JPH0450702B2 - - Google Patents

Info

Publication number
JPH0450702B2
JPH0450702B2 JP62020358A JP2035887A JPH0450702B2 JP H0450702 B2 JPH0450702 B2 JP H0450702B2 JP 62020358 A JP62020358 A JP 62020358A JP 2035887 A JP2035887 A JP 2035887A JP H0450702 B2 JPH0450702 B2 JP H0450702B2
Authority
JP
Japan
Prior art keywords
hole
mass spectrometer
plasma
rear surface
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62020358A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62190647A (ja
Inventor
Kyanpuberu Hatsuton Robaato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BUI JII INSUTORUMENTSU GURUUPU Ltd
Original Assignee
BUI JII INSUTORUMENTSU GURUUPU Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=10592338&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JPH0450702(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by BUI JII INSUTORUMENTSU GURUUPU Ltd filed Critical BUI JII INSUTORUMENTSU GURUUPU Ltd
Publication of JPS62190647A publication Critical patent/JPS62190647A/ja
Publication of JPH0450702B2 publication Critical patent/JPH0450702B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/067—Ion lenses, apertures, skimmers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP62020358A 1986-01-31 1987-01-30 誘導結合プラズマのための質量分析装置 Granted JPS62190647A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB8602463 1986-01-31
GB868602463A GB8602463D0 (en) 1986-01-31 1986-01-31 Mass spectrometer

Publications (2)

Publication Number Publication Date
JPS62190647A JPS62190647A (ja) 1987-08-20
JPH0450702B2 true JPH0450702B2 (en]) 1992-08-17

Family

ID=10592338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62020358A Granted JPS62190647A (ja) 1986-01-31 1987-01-30 誘導結合プラズマのための質量分析装置

Country Status (5)

Country Link
US (1) US4760253A (en])
EP (1) EP0231131B1 (en])
JP (1) JPS62190647A (en])
DE (1) DE3773003D1 (en])
GB (1) GB8602463D0 (en])

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS639761U (en]) * 1986-07-07 1988-01-22
GB8813149D0 (en) * 1988-06-03 1988-07-06 Vg Instr Group Mass spectrometer
US4926021A (en) * 1988-09-09 1990-05-15 Amax Inc. Reactive gas sample introduction system for an inductively coupled plasma mass spectrometer
GB8826966D0 (en) * 1988-11-18 1988-12-21 Vg Instr Group Plc Gas analyzer
GB8901975D0 (en) 1989-01-30 1989-03-22 Vg Instr Group Plasma mass spectrometer
JP2543761B2 (ja) * 1989-03-23 1996-10-16 セイコー電子工業株式会社 誘導結合プラズマ質量分析装置
US5006706A (en) * 1989-05-31 1991-04-09 Clemson University Analytical method and apparatus
JPH03194843A (ja) * 1989-12-25 1991-08-26 Hitachi Ltd プラズマイオン源極微量元素質量分析装置
FR2656926B1 (fr) * 1990-01-05 1993-06-11 Air Liquide Perfectionnement au procede d'analyse elementaire d'un echantillon par spectrometrie de masse couplee a un plasma induit par haute frequence et a l'installation pour la mise en óoeuvre de ce procede.
US5229605A (en) * 1990-01-05 1993-07-20 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Process for the elementary analysis of a specimen by high frequency inductively coupled plasma mass spectrometry and apparatus for carrying out this process
FR2685977A1 (fr) * 1992-01-07 1993-07-09 Air Liquide Electrode d'interface et ensemble d'analyse de gaz a spectrometre de masse comportant une telle electrode.
US5313067A (en) * 1992-05-27 1994-05-17 Iowa State University Research Foundation, Inc. Ion processing apparatus including plasma ion source and mass spectrometer for ion deposition, ion implantation, or isotope separation
US6330426B2 (en) * 1994-05-23 2001-12-11 Stephen J. Brown System and method for remote education using a memory card
JP3123843B2 (ja) * 1992-12-17 2001-01-15 日本電子株式会社 プラズマフレームを用いた試料気化装置
DE4322102C2 (de) * 1993-07-02 1995-08-17 Bergmann Thorald Flugzeit-Massenspektrometer mit Gasphasen-Ionenquelle
US5495107A (en) * 1994-04-06 1996-02-27 Thermo Jarrell Ash Corporation Analysis
JP3355376B2 (ja) * 1995-02-27 2002-12-09 株式会社日立製作所 質量分析装置、スキマ−コ−ン組立体及びスキマ−コ−ン
US6222186B1 (en) 1998-06-25 2001-04-24 Agilent Technologies, Inc. Power-modulated inductively coupled plasma spectrometry
US7642531B2 (en) * 2006-07-14 2010-01-05 Tel Epion Inc. Apparatus and method for reducing particulate contamination in gas cluster ion beam processing equipment
US7948215B2 (en) * 2007-04-19 2011-05-24 Hadronex, Inc. Methods and apparatuses for power generation in enclosures
US8981322B2 (en) * 2009-02-04 2015-03-17 Tel Epion Inc. Multiple nozzle gas cluster ion beam system
US20100243913A1 (en) * 2009-03-31 2010-09-30 Tel Epion Inc. Pre-aligned nozzle/skimmer
JP5965743B2 (ja) * 2012-06-27 2016-08-10 株式会社日立ハイテクサイエンス Ｉｃｐ装置及び分光分析装置並びに質量分析装置
EP3047510B1 (en) * 2013-09-20 2020-03-18 Micromass UK Limited Tool free gas cone retaining device for mass spectrometer ion block assembly
GB201316697D0 (en) * 2013-09-20 2013-11-06 Micromass Ltd Tool free gas cone retaining device for mass spectrometer ion block assembly
US9540725B2 (en) 2014-05-14 2017-01-10 Tel Epion Inc. Method and apparatus for beam deflection in a gas cluster ion beam system
JP2019066249A (ja) * 2017-09-29 2019-04-25 田辺三菱製薬株式会社 元素不純物測定用試料調製方法
GB2585327B (en) * 2018-12-12 2023-02-15 Thermo Fisher Scient Bremen Gmbh Cooling plate for ICP-MS
KR20230123998A (ko) 2020-12-23 2023-08-24 엠케이에스 인스트루먼츠 인코포레이티드 질량 분석법을 사용하는 라디칼 입자 농도 모니터링

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1189201A (en) * 1982-12-08 1985-06-18 Donald J. Douglas Method and apparatus for sampling a plasma into a vacuum chamber
JPH0746594B2 (ja) * 1983-12-21 1995-05-17 株式会社島津製作所 誘導結合プラズマをイオン源とする質量分析装置

Also Published As

Publication number Publication date
DE3773003D1 (de) 1991-10-24
US4760253A (en) 1988-07-26
EP0231131A2 (en) 1987-08-05
EP0231131A3 (en) 1988-11-23
JPS62190647A (ja) 1987-08-20
EP0231131B1 (en) 1991-09-18
GB8602463D0 (en) 1986-03-05

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees